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Chapter 1249 Domestic Lithography Machines Are About To Be Mass-Produced, And Asml Is Completely Pan



Chapter 1249 Domestic Lithography Machines Are About To Be Mass-Produced, And Asml Is Completely Pan

Photolithography machines have the crown title in the industry.

It is absolutely impossible for one company or several companies to play well.

even.

Relying on the power of one country alone may not necessarily turn it into a lithography machine.

Like ASML, although it is the current overlord of lithography machines.

However, some of ASML's technologies come from America, some from Hans Country, some from Island Country, some from Han Country, and even Long Guoyingwan.

It can be seen from this.

It is simply impossible to produce advanced photolithography machines by relying on ASML alone, or in other words, relying on the strength of the Tulip Country alone.

For the rise of domestic lithography machines, it is unrealistic to rely solely on a few companies such as Shanghai Microelectronics and Coastal Semiconductor.

More domestic companies need to participate.

A lithography machine has 12 subsystems: light source exposure system, workbench system, projection objective lens system, mask stage system, automatic calibration system, etc.

For the technologies of these subsystems, some domestic technologies are not very different from foreign technologies, but some subsystem technologies are quite different from foreign technologies.

For example, the three major systems of light source, workbench, and objective lens are very different from those in foreign countries.

At present, the light source problem has been solved, which can be regarded as a very core problem solved.

However, in terms of the two major systems of workbench and objective lens, the gap between domestic technology and overseas technology is still huge.

Take the workbench system as an example.

There are two synchronously moving worktables in the lithography machine, one for carrying negatives and one for carrying film.

The two need to be synchronized at all times, and the error is below 2nm.

The two worktables moved from static to dynamic, with an acceleration similar to that of a missile launch.

When working, it is equivalent to two large airplanes moving hand in hand from takeoff to landing. A knife sticks out from one airplane and engraves words on the rice grains of the other airplane.

If the accuracy of the workbench is not enough, the impact will be that the carved characters may be crooked and incorrect.

The accuracy of the lithography machine determines the upper limit of chip performance.

The accuracy of the double worktable determines the accuracy of the photolithography machine.

It is not an exaggeration to describe a mistake as a thousand miles.

Regardless of the current domestic lithography machines, there have been major technological breakthroughs in the light source area.

All of a sudden, the process of domestic lithography machines was upgraded from 90nm to 28nm, catching up with the three major international lithography machine giants.

but.

Domestic lithography machines still have many technologies that are subject to overseas restrictions.

These technical difficulties still need to be overcome by relevant domestic enterprises.

We cannot put all our hopes on Shanghai Microelectronics and Coastal Semiconductor.

Vice President Wang learned about some of the major difficulties and pain points currently faced by domestic lithography machines, and he nodded and took them to heart.

Lithography machine technology involves too many scientific categories.

It cannot be done by one or two companies.

Other related companies are needed to work together to overcome difficulties and promote the forward development of domestic lithography machines.

Although related technologies such as workbenches and objective lenses are being developed by many domestic companies.

but.

These forces are not organized and do not receive strong support from the state.

In terms of related technological breakthroughs, progress is very slow.

even.

Some of the achievements achieved are equivalent to overseas technologies more than ten years ago.

Such technological breakthroughs are completely insufficient for current domestic lithography machines.

The problem of the ‘engraving knife’ of the domestic lithography machine on site, that is, the light source system, has been solved.

If other system technologies cannot make breakthroughs, the accuracy of domestic lithography machines will probably remain at the 28nm level.

"Now domestic lithography machines have made breakthroughs in the issue of light sources. We no longer have to worry about being stuck overseas. Even our steady-state micro-focusing light source device has reached the world's leading level.

"However, there is still a big gap with overseas countries in aspects such as dual workpiece stages, objective lens systems, automatic calibration systems, etc. These are all constraints that restrict the further improvement of the accuracy of domestic lithography machines.

Difficulties and skin points. "

Zhang Rujin said.

Vice President Wang nodded and asked, "What do you think, Mr. Zhang, about this?"

Zhang Rujin said: "It is unrealistic to rely solely on Shanghai Microelectronics and Coastal Semiconductor to solve some of the problems that domestic lithography machines are stuck in. Companies that specialize in this area need to be responsible for solving the problems."

"My idea is whether the country can intervene and gather a group of relevant companies to tackle these difficulties and pain points, so that we can make domestic lithography machines bigger and stronger."

Vice President Wang nodded and said: "Mr. Zhang, I will report your ideas to the superiors.

That night.

Vice President Wang and his team went to Loongson International to conduct research and were featured on the seven o'clock news.

And the face was shown for two and a half minutes.

in the news.

The host focused on the breakthroughs of domestic lithography machines in the light source area, saying that domestic steady-state micro-focusing light source devices have reached the world's leading level.

Of course.

After praising the series of major breakthroughs made by domestic lithography machines, he did not forget to put on the brakes.

He said that although domestic lithography machines have made major technological breakthroughs, there are still many pain points and difficulties that need to be overcome.

Many people in the industry have eyes flashing after watching the seven o'clock news.

because.

The team that went to Loongson International for research this time was really luxurious.

Is there any other meaning behind this survey?

These have aroused extensive thinking among people in the industry.

Two more days passed.

Loongson International announced in an announcement that the yield rate of chips produced by domestic photolithography machines has been qualitatively improved, and the current yield rate is as high as over 90%.

As soon as this news came out, it immediately caused an uproar in the industry.

An increase in yield means a decrease in chip prices.

at the same time.

A yield rate of more than 90% also means that domestic lithography machines are about to be finalized and mass-produced.

This is definitely a big plus for the domestic chip semiconductor industry.

No.

The day after the news broke.

Some companies have called Shanghai Microelectronics to inquire about the situation and are interested in reaching cooperation with Shanghai Microelectronics.

relatively.

The three major lithography machine giants are in a bad mood.

Nikang and Jianeng previously sold their own photolithography machines to Longguo chip manufacturers and made a lot of money.

But as news of Loongson International spread, the attitudes of some domestic chip manufacturers have become ambiguous.

This also forces Nikang and Jianeng to continue to cut prices to impress customers.

ASML on the other side, restricted by America's government, was unable to sell advanced photolithography machines to Longguo. It could only watch Ni Kang and Jianeng take advantage of this opportunity to make a lot of money.

Now.

With the news that domestic lithography machines are about to be finalized and mass-produced, ASML can't sit still.

They didn't expect it at all.

The yield rate of domestic lithography machines has increased so rapidly, and the production of finalized wafers has been so fast.

This doesn't give them any time to react.

They seem to have seen that they will completely lose the super market of Longguo. .


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